Effect of Annealing on the Lateral Homogeneity of Ti/InAlAs Schottky Barriers

The authors study the effect the temperature (300–450°C) and period (0–20 min) of annealing have on the parameters (barrier height and ideality factor) and homogeneity of Au/Pt/Ti/i( n )‒In 0.52 Al 0.48 As(001) Schottky barriers. The homogeneity of the Schottky barriers is determined by analyzing th...

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Bibliographic Details
Published in:Bulletin of the Russian Academy of Sciences. Physics 2024-09, Vol.88 (9), p.1485-1489
Main Authors: Genze, I. Yu, Aksenov, M. S., Dmitriev, D. V.
Format: Article
Language:English
Subjects:
Annealing
Hadrons
Heavy Ions
Homogeneity
Nuclear Physics
Parameters
Physics
Physics and Astronomy
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Summary:The authors study the effect the temperature (300–450°C) and period (0–20 min) of annealing have on the parameters (barrier height and ideality factor) and homogeneity of Au/Pt/Ti/i( n )‒In 0.52 Al 0.48 As(001) Schottky barriers. The homogeneity of the Schottky barriers is determined by analyzing the temperature dependences of their parameters in the range of 80–350 K and the Richardson plots in the Tung model.
ISSN:1062-8738
1934-9432
DOI:10.1134/S1062873824707736