Polygon-based unified Fourier-modal approach for diffractive optics simulations

In this article, we derive a theoretical formalism that unifies the rigorous coupled wave analysis and the dynamical diffraction theory. Based on this formalism, we design a computational approach for the diffraction calculation for the nanoscale lamellar gratings with an arbitrary line profile shap...

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Bibliographic Details
Published in:arXiv.org 2024-10
Main Authors: Nikolaev, K V, Soltwisch, V, Botchev, M A, A Fernández Herrero, Hönicke, P, Scholze, F, Yakunin, S N
Format: Article
Language:English
Subjects:
Diffraction theory
Diffractive optics
Formalism
Gratings (spectra)
Polygons
Wave diffraction
Online Access:Get full text
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Summary:In this article, we derive a theoretical formalism that unifies the rigorous coupled wave analysis and the dynamical diffraction theory. Based on this formalism, we design a computational approach for the diffraction calculation for the nanoscale lamellar gratings with an arbitrary line profile shape. In this approach, the gratings line profile is approximated as a polygon. This proves to be convenient since such an approach does not rely on the geometry model of the grating. We test the new approach against other computational theories and a synchrotron scattering experiment.
ISSN:2331-8422