Thermal inverse design for resistive micro-heaters

This paper proposes an inverse design scheme for resistive heaters. By adjusting the spatial distribution of a binary electrical resistivity map, the scheme enables objective-driven optimization of heaters to achieve pre-defined steady-state temperature profiles. The approach can be fully automated...

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Bibliographic Details
Published in:Journal of applied physics 2024-12, Vol.136 (22)
Main Authors: Dao, Khoi Phuong, Hu, Juejun
Format: Article
Language:English
Subjects:
Design optimization
Inverse design
Microelectromechanical systems
Spatial distribution
Temperature profiles
Online Access:Get full text
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Summary:This paper proposes an inverse design scheme for resistive heaters. By adjusting the spatial distribution of a binary electrical resistivity map, the scheme enables objective-driven optimization of heaters to achieve pre-defined steady-state temperature profiles. The approach can be fully automated and is computationally efficient since it does not entail extensive iterative simulations of the entire heater structure. The design scheme offers a powerful solution for resistive heater device engineering in applications spanning electronics, photonics, and microelectromechanical systems.
ISSN:0021-8979
1089-7550
DOI:10.1063/5.0235526