Thermal inverse design for resistive micro-heaters

This paper proposes an inverse design scheme for resistive heaters. By adjusting the spatial distribution of a binary electrical resistivity map, the scheme enables objective-driven optimization of heaters to achieve pre-defined steady-state temperature profiles. The approach can be fully automated...

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Published in:Journal of applied physics 2024-12, Vol.136 (22)
Main Authors: Dao, Khoi Phuong, Hu, Juejun
Format: Article
Language:English
Subjects:
Design optimization
Inverse design
Microelectromechanical systems
Spatial distribution
Temperature profiles
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Hu, Juejun
description This paper proposes an inverse design scheme for resistive heaters. By adjusting the spatial distribution of a binary electrical resistivity map, the scheme enables objective-driven optimization of heaters to achieve pre-defined steady-state temperature profiles. The approach can be fully automated and is computationally efficient since it does not entail extensive iterative simulations of the entire heater structure. The design scheme offers a powerful solution for resistive heater device engineering in applications spanning electronics, photonics, and microelectromechanical systems.
doi_str_mv 10.1063/5.0235526
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subjects Design optimization
Inverse design
Microelectromechanical systems
Spatial distribution
Temperature profiles
title Thermal inverse design for resistive micro-heaters
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