Sensitivity Dependence of the Planar Hall Effect Sensor on the Free Layer of the Spin-Valve Structure

Planar Hall effect (PHE) sensors with the junction size of 50 mum times 50 mum were fabricated successfully by using spin-valve thin films Ta(5)/NiFe(x) /Cu(1.2)/NiFe(2)/IrMn(15)/Ta(5) (nm) with x = 4, 8, 10, 12, 16. The magnetic field sensitivity of the PHE sensors increases with increasing thickne...

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Bibliographic Details
Published in:IEEE transactions on magnetics 2009-06, Vol.45 (6), p.2374-2377
Main Authors: Hung, T.Q., Oh, S.J., Tu, B.D., Duc, N.H., Phong, L.V., AnandaKumar, S., Jeong, J.-R., Kim, C.G.
Format: Article
Language:English
Subjects:
Anisotropic magnetoresistance
Biosensor applications
Biosensors
Couplings
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Ferromagnetism
Hall effect
Hall effect devices
high field sensitivity
Magnetic fields
Magnetic materials
Magnetic sensors
Magnetism
Materials science
Materials science and technology
Mathematical models
micro-beads detection
Other topics in materials science
Physics
planar Hall effect
Sensors
Shunts
Signal to noise ratio
Thin film sensors
Thin films
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Summary:Planar Hall effect (PHE) sensors with the junction size of 50 mum times 50 mum were fabricated successfully by using spin-valve thin films Ta(5)/NiFe(x) /Cu(1.2)/NiFe(2)/IrMn(15)/Ta(5) (nm) with x = 4, 8, 10, 12, 16. The magnetic field sensitivity of the PHE sensors increases with increasing thickness of ferromagnetic (FM) free layer. The sensitivity of about 95.5 m Omega/(kA/m) can be obtained when the thickness of the FM-free layer increases up to 16 nm. The enhancement of sensitivity is explained by the shunt current from other layers. The PHE profiles are well described in terms of the Stoner-Wohlfarth energy model. The detection of magnetic micro-beads label Dynabeads reg M-280 is demonstrated and the results revealed that the sensor is feasible for high-resolution biosensor applications.
ISSN:0018-9464
1941-0069
DOI:10.1109/TMAG.2009.2018578