Optical Filters Utilizing Ion Implanted Bragg Gratings in SOI Waveguides

The refractive index modulation associated with the implantation of oxygen or silicon into waveguides formed in silicon-on-insulator (SOI) has been investigated to determine the feasibility of producing planar, implantation induced Bragg grating optical filters. A two-dimensional coupled mode theory...

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Bibliographic Details
Published in:Advances in optical technologies 2008, Vol.2008 (1)
Main Authors: Bulk, M. P., Knights, A. P., Jessop, P. E., Waugh, P., Loiacono, R., Mashanovich, G. Z., Reed, G. T., Gwilliam, R. M.
Format: Article
Language:English
Subjects:
Colleges & universities
Plasma etching
Point defects
R&D
Research & development
Silicon wafers
Temperature
Transplants & implants
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Summary:The refractive index modulation associated with the implantation of oxygen or silicon into waveguides formed in silicon-on-insulator (SOI) has been investigated to determine the feasibility of producing planar, implantation induced Bragg grating optical filters. A two-dimensional coupled mode theory-based simulation suggests that relatively short grating lengths, on the order of a thousand microns, can exhibit sufficient wavelength suppression, of >10 dB, using the implantation technique. Fabricated planar implanted slab-guided SOI waveguides demonstrated an extinction of −10 dB for TE modes and −6 dB for TM modes for the case of oxygen implantation. Extinctions of −5 dB and −2 dB have been demonstrated with silicon implantation.
ISSN:1687-6393
1687-6407
DOI:10.1155/2008/276165