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Self-Organization Effects in Photopolymerizable Nanocomposite
The main problem of photolithography is to overcome the diffraction limit. A possibility of overcoming this limit by the application of self-writing effects is discussed. Some of these effects are studied in the present work: the self-focusing of light in a photopolymer with a positive change of the...
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Published in: | Molecular Crystals and Liquid Crystals 2011-02, Vol.536, p.233 |
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Main Authors: | , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Online Access: | Get full text |
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Summary: | The main problem of photolithography is to overcome the diffraction limit. A possibility of overcoming this limit by the application of self-writing effects is discussed. Some of these effects are studied in the present work: the self-focusing of light in a photopolymer with a positive change of the refractive index, photo-induced transportation of nanoparticles, and the threshold of oxygen-based polymerization. The results of applications of these effects to the lithography process are shown. [PUBLICATION ABSTRACT] |
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ISSN: | 1542-1406 1527-1943 |