Determination of Work Functions in the [Formula Omitted] Advanced Gate Stack Using Combinatorial Methodology

Saved in:
Bibliographic Details
Published in:IEEE transactions on electron devices 2008-10, Vol.55 (10), p.2641
Main Authors: Kao-Shuo Chang, Kao-Shuo Chang, Green, M.L, Hattrick-Simpers, J.R, Takeuchi, I, Suehle, J.S, Celik, O, De Gendt, S
Format: Article
Language:English
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:
ISSN:0018-9383
1557-9646
DOI:10.1109/TED.2008.2003091