Agarose-Gel Based Guided-Mode Resonance Humidity Sensor

A photonic relative-humidity (RH) sensor employing the guided-mode resonance effect is designed, fabricated, and characterized. An agarose-gel transduction layer is integrated with a periodic silicon-nitride film to form a sensitive optical resonance structure. As the agarose-gel humidifies, the res...

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Bibliographic Details
Published in:IEEE sensors journal 2007-03, Vol.7 (3), p.409-414
Main Authors: Lee, K.J., Wawro, D., Priambodo, P.S., Magnusson, R.
Format: Article
Language:English
Subjects:
Agarose gels
Diffraction
diffractive optical elements
guided-mode resonance
Humidity
humidity sensor
Integrated optics
Optical films
Optical refraction
Optical resonance
optical sensor
Optical sensors
Optical variables control
Optoelectronic and photonic sensors
Refractive index
Refractivity
Relative humidity
Resonance
Semiconductor films
Sensor phenomena and characterization
Sensors
Wavelengths
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Description
Summary:A photonic relative-humidity (RH) sensor employing the guided-mode resonance effect is designed, fabricated, and characterized. An agarose-gel transduction layer is integrated with a periodic silicon-nitride film to form a sensitive optical resonance structure. As the agarose-gel humidifies, the resonance wavelength shifts. Comparison with rigorous diffraction models allows quantification of the gel's refractive index and the attendant relative humidity. For the example sensor structure treated, the resonance wavelength shifts by ~9 nm on relative-humidity change from 20% RH to 80% RH
ISSN:1530-437X
1558-1748
DOI:10.1109/JSEN.2006.890129