Polymeric microring resonator using nanoimprint technique based on a stamp incorporating a smoothing buffer Layer

A polymeric microring resonator has been proposed and fabricated using the nanoimprint technique based on a stamp incorporating a smoothing buffer layer. It played a pivotal role in improving the sidewall roughness of the waveguide pattern engraved on the stamp and thus reducing its scattering loss....

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Bibliographic Details
Published in:IEEE photonics technology letters 2005-11, Vol.17 (11), p.2352-2354
Main Authors: Do-Hwan Kim, Jung-Gyu Im, Sang-Shin Lee, Ahn, S.-W., Ki-Dong Lee
Format: Article
Language:English
Subjects:
Buffer layers
Electromagnetic scattering
Etching
Nanocomposites
Nanomaterials
Nanostructure
Noise levels
Optical coupling
Optical resonators
Particle scattering
Polymers
Q factor
Quality factor
Resonator filters
Resonators
Scattering
Smoothing
Smoothing methods
Soft lithography
waveguide components
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Summary:A polymeric microring resonator has been proposed and fabricated using the nanoimprint technique based on a stamp incorporating a smoothing buffer layer. It played a pivotal role in improving the sidewall roughness of the waveguide pattern engraved on the stamp and thus reducing its scattering loss. Eventually, the quality factor of the resonator could be enhanced. It also helped narrow down the gap between the ring and the bus effectively to strengthen the coupling between them. For the fabricated device, the quality factor of /spl sim/103 800 and the extinction ratio of /spl sim/11 dB were achieved at 1550 nm, while the estimated scattering loss was reduced from 38 to 0.0005 dB/mm with the help of the smoothing layer.
ISSN:1041-1135
1941-0174
DOI:10.1109/LPT.2005.857606