Design, Fabrication, and Characterization of a Resonant Magnetic Field Sensor Based on MEMS Technology

We present the design, fabrication, and characterization of a resonant magnetic field sensor based on Microelectromechanical systems (MEMS). This sensor exploits the Lorentz force principle and uses a Wheatstone bridge of p-type piezoresistors. Its resonant structure is integrated with silicon beams...

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Bibliographic Details
Published in:Integrated ferroelectrics 2011-01, Vol.126 (1), p.94-105
Main Authors: Herrera-May, A. L., García-Ramírez, P. J., Aguilera-Cortés, L. A., Martínez-Castillo, J., Juárez-Aguirre, R., Domínguez-Nicolás, S. M., Bravo-Barrera, C. F., Figueras, E.
Format: Article
Language:English
Subjects:
Aluminum
Atmospheric pressure
Design engineering
Energy consumption
Lorentz force
magnetic field sensor
Magnetic fields
MEMS
Microelectromechanical systems
piezoresistor
Piezoresistors
Power consumption
Quality factor
resonant structure
Sensors
Silicon
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Summary:We present the design, fabrication, and characterization of a resonant magnetic field sensor based on Microelectromechanical systems (MEMS). This sensor exploits the Lorentz force principle and uses a Wheatstone bridge of p-type piezoresistors. Its resonant structure is integrated with silicon beams (15 μm wide and 5 μm thick) and an aluminum loop (9 μm wide and 1 μm thick). The sensor operates in its first flexural resonant frequency (22.99 kHz) and has a linear response, a high resolution (43 nT), a sensitivity of 1.94 V·T −1 , a quality factor of 96.6 at atmospheric pressure, and power consumption close to 16 mW.
ISSN:1058-4587
1607-8489
DOI:10.1080/10584587.2011.575013