Experimental and numerical study of SiON microresonators with air and polymer cladding

A systematic experimental and numerical study of the device performance of waveguide-coupled SiON microresonators with air and polymer cladding is presented. Values of device parameters like propagation losses of the microresonator modes, the off-resonance insertion losses, and the straight waveguid...

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Bibliographic Details
Published in:Journal of lightwave technology 2003-04, Vol.21 (4), p.1099-1110
Main Authors: Klunder, D.J.W., Tan, F.S., van der Veen, T., Bulthuis, H.F., Sengo, G., Docter, B., Hoekstra, H.J.W.M., Driessen, A.
Format: Article
Language:English
Subjects:
Applied sciences
Circuit properties
Cladding
Devices
Electric, optical and optoelectronic circuits
Electronics
Exact sciences and technology
Fittings
Insertion loss
Integrated optics
Integrated optics. Optical fibers and wave guides
Loss measurement
Mathematical models
Microcavities
Optical and optoelectronic circuits
Optical filters
Optical losses
Optical waveguides
Polymers
Propagation
Propagation (polymerization)
Propagation losses
Resonance
Silicon oxynitride
Studies
Wave propagation
Waveguides
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Summary:A systematic experimental and numerical study of the device performance of waveguide-coupled SiON microresonators with air and polymer cladding is presented. Values of device parameters like propagation losses of the microresonator modes, the off-resonance insertion losses, and the straight waveguide to microresonator coupling are determined by applying a detailed fitting procedure to the experimental results and compared to results of detailed numerical simulations. By comparing the propagation losses of the fundamental TE polarized microresonator mode obtained by fitting to the measured spectra to the also experimentally determined propagation losses in the adjacent straight waveguide and the materials losses, it is possible to identify the loss mechanisms in the microresonator. By comparing experimental results for microresonators with air and polymethylmethacrylate cladding and a detailed numerical study, the influence of the cladding index on the bend losses is evaluated. It is demonstrated that the presence of an upper cladding can, under the right conditions, actually be beneficial for loss reduction.
ISSN:0733-8724
1558-2213
DOI:10.1109/JLT.2003.810100