Comparative characteristics of on-chip single- and double-level square inductors

Detailed experimental investigations reported in this paper have determined the inductances, Q factors, and resonance frequencies of on-chip square, single-level (SL) and double-level (DL) inductors on silicon substrates, using the equivalent circuit model and the measured S parameters. Parametric s...

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Bibliographic Details
Published in:IEEE transactions on magnetics 2003-05, Vol.39 (3), p.1778-1783
Main Authors: Yin, W.Y., Pan, S.J., Li, L.W.
Format: Article
Language:English
Subjects:
Applied sciences
Electronic equipment and fabrication. Passive components, printed wiring boards, connectics
Electronics
Equivalent circuits
Exact sciences and technology
Extrapolation
Frequency measurement
Inductance
Inductors
Inductors and coils
wiring
Joining
Magnetism
Mathematical models
Q factor
Q factors
Q measurement
Resonance
Resonant frequency
Scattering parameters
Semiconductor device measurement
Silicon
Silicon substrates
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Description
Summary:Detailed experimental investigations reported in this paper have determined the inductances, Q factors, and resonance frequencies of on-chip square, single-level (SL) and double-level (DL) inductors on silicon substrates, using the equivalent circuit model and the measured S parameters. Parametric studies show the effects of both strip length and inner empty area on the coupling capacitance and resonance frequency. Some scalable formulas are derived for extrapolating inductance and resonance frequency of other inductors. In the DL chips, very strong self-resonance can take place with lower resonance frequency, and the Q factor will be degraded rapidly.
ISSN:0018-9464
1941-0069
DOI:10.1109/TMAG.2003.809860