A refractive free-space microoptical 4×4 interconnect on chip level with optical fan-out fabricated by the LIGA technique

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Bibliographic Details
Published in:IEEE photonics technology letters 2002-10, Vol.14 (10), p.1484
Main Authors: Voigt, S, Kufner, S, Kufner, A, Frese, I
Format: Article
Language:English
Online Access:Get full text
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ISSN:1041-1135
1941-0174
DOI:10.1109/LPT.2002.801834