MEMS: micro technology, mega impact

The variety and applications of microelectromechanical systems (MEMS) devices have increased dramatically, improving existing uses or enabling entirely new ones. This article surveys some of the current and projected applications of MEMS.

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Bibliographic Details
Published in:IEEE circuits and devices magazine 2001-03, Vol.17 (2), p.14-25
Main Authors: Nagel, D.J., Zaghloul, M.E.
Format: Article
Language:English
Subjects:
Biomedical equipment
Ink jet printing
Medical services
Microelectromechanical devices
Microelectromechanical systems
Microelectronics
Micromechanical devices
Optical fiber networks
Production
Space technology
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Description
Summary:The variety and applications of microelectromechanical systems (MEMS) devices have increased dramatically, improving existing uses or enabling entirely new ones. This article surveys some of the current and projected applications of MEMS.
ISSN:8755-3996
1558-1888
DOI:10.1109/101.920875