Low-power consumption polymeric attenuator using a micromachined membrane-type waveguide

We have proposed and demonstrated a low-power consumption thermooptic variable optical attenuator incorporating a membrane-type asymmetric branch waveguide in polymers. The membrane structure has been introduced by partially removing the silicon substrate with a bulk micromachining technique of back...

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Published in:IEEE photonics technology letters 2000-04, Vol.12 (4), p.407-409
Main Authors: Lee, Sang-Shin, Bu, Jong-Uk, Lee, Seung-Yeob, Song, Ki-Chang, Park, Chil-Geun, Kim, Tae-Sik
Format: Article
Language:English
Subjects:
Arm
Asymmetry
Attenuation
Attenuators
Biomembranes
Etching
Membrane structures
Micromachining
Optical attenuators
Optical polymers
Optical waveguides
Polymers
Silicon
Temperature
Waveguides
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cited_by cdi_FETCH-LOGICAL-c403t-9c16d63237c66f0d7af62b50ed8c26d9e90bccd3a968f942817971ecae9cce703
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container_title IEEE photonics technology letters
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creator Lee, Sang-Shin
Bu, Jong-Uk
Lee, Seung-Yeob
Song, Ki-Chang
Park, Chil-Geun
Kim, Tae-Sik
description We have proposed and demonstrated a low-power consumption thermooptic variable optical attenuator incorporating a membrane-type asymmetric branch waveguide in polymers. The membrane structure has been introduced by partially removing the silicon substrate with a bulk micromachining technique of backside etching. As a result, the heat flow in the polymer layers has been appropriately adjusted to increase the temperature gradient between the two arms of the branch and thus to enhance the attenuation efficiency. The measured electrical power consumption of the proposed attenuator was as small as 25 mW at 1550 nm, which was reduced by about 50% compared to that of the conventional device. Further improvement is achieved by a more optimized design of the area to be etched away.
doi_str_mv 10.1109/68.839034
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subjects Arm
Asymmetry
Attenuation
Attenuators
Biomembranes
Etching
Membrane structures
Micromachining
Optical attenuators
Optical polymers
Optical waveguides
Polymers
Silicon
Temperature
Waveguides
title Low-power consumption polymeric attenuator using a micromachined membrane-type waveguide
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