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Using porous silicon as semi-insulating substrate for [beta]-SiC high temperature optical-sensing devices
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Published in: | IEEE transactions on electron devices 2001-04, Vol.48 (4), p.801 |
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Main Authors: | , , , , , |
Format: | Article |
Language: | English |
Online Access: | Get full text |
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Summary: | |
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ISSN: | 0018-9383 1557-9646 |
DOI: | 10.1109/16.915729 |