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Using porous silicon as semi-insulating substrate for [beta]-SiC high temperature optical-sensing devices

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Bibliographic Details
Published in:IEEE transactions on electron devices 2001-04, Vol.48 (4), p.801
Main Authors: Hsieh, W.T, Fang, Y.K, Wu, K.H, Lee, W.J, Ho, J.J, Ho, C.W
Format: Article
Language:English
Online Access:Get full text
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ISSN:0018-9383
1557-9646
DOI:10.1109/16.915729