The Effect of Deposition Temperature and Work Pressure on Ti-B-C Nanocomposite Coating Prepared by Multitarget Magnetron Cosputtering

Ternary Ti-B-C nanocomposite coatings were synthesized on a Si(100) wafer and stainless steel substrates from Ti and B 4 C targets, respectively, by multitarget magnetron cosputtering. Extensive measurements were taken to investigate the influences of deposition temperature and work pressure on micr...

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Bibliographic Details
Published in:IEEE transactions on plasma science 2011-11, Vol.39 (11), p.3115-3119
Main Authors: Liu, M. Y., Yan, J. Y., Zhang, S., Dong, L., Cao, M., Deng, X. Y., Li, D. J.
Format: Article
Language:English
Subjects:
Amorphous magnetic materials
Chemicals
Coating
Coatings
Crystal structure
Deposition
Friction
Hardness
High temperature
Microstructure
multitarget magnetron cosputtering
nanocomposite coating
Nanocomposites
Nanomaterials
Nanostructure
Plasma temperature
Residual stress
Residual stresses
Substrates
Ti-B-C coating
Titanium
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Summary:Ternary Ti-B-C nanocomposite coatings were synthesized on a Si(100) wafer and stainless steel substrates from Ti and B 4 C targets, respectively, by multitarget magnetron cosputtering. Extensive measurements were taken to investigate the influences of deposition temperature and work pressure on microstructure, hardness, elastic modulus, residual stress, friction coefficient, and adhesion strength. The maximum hardness of 42 GPa occurred at the deposition temperature of 400 ° C and work pressure of 0.5 Pa. The hardest coating also showed the lowest residual stress and the highest critical load. These enhancement effects should be related to nanocrystalline structure formation.
ISSN:0093-3813
1939-9375
DOI:10.1109/TPS.2011.2162081