Electrical performance and reliability improvement by using compositionally varying bi-layer structure of PVD HfSixOy dielectric

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Bibliographic Details
Published in:IEEE electron device letters 2005-03, Vol.26 (3), p.166-168
Main Authors: AKBAR, Mohammad S, CHOI, C. H, LEE, Jack C, RHEE, S. J, KRISHNAN, S. A, KANG, C. Y, ZHANG, M. H, LEE, T, OK, I. J, ZHU, F, KIM, H.-S
Format: Article
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Microelectronic fabrication (materials and surfaces technology)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Transistors
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ISSN:0741-3106
1558-0563
DOI:10.1109/LED.2005.843927