Leakage suppression of gated diodes fabricated under low-temperature annealing with substitutional carbon Si1-yCy incorporation

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Bibliographic Details
Published in:IEEE electron device letters 2005-04, Vol.26 (4), p.252-254
Main Authors: CHUNG FOONG TAN, ENG FONG CHOR, LEE, Hyeokjae, JINPING LIU, QUEK, Elgin, CHAN, Lap
Format: Article
Language:English
Subjects:
Applied sciences
Diodes
Electronics
Exact sciences and technology
Microelectronic fabrication (materials and surfaces technology)
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Online Access:Get full text
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ISSN:0741-3106
1558-0563
DOI:10.1109/LED.2005.845501