Niobium SupraMEMS for Reconfigurable Millimeter Wave Filters

Reconfigurable passive superconducting devices for the mm-wave regime offer a large spectrum of novel applications in scientific and industrial remote sensing. We developed a surface mounted Niobium (Nb) MEMS technology that can be integrated with a wide range of cryogenic semiconductor and supercon...

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Bibliographic Details
Published in:IEEE transactions on applied superconductivity 2007-06, Vol.17 (2), p.910-913
Main Authors: Schicke, Matthias, Navarrini, Alessandro, Ferrari, Philippe, Zopfl, Teresa, Wittmann, Franz, Bedyk, Witek, Schrag, Gabi, Schuster, Karl-Friedrich
Format: Article
Language:English
Subjects:
Applied sciences
Capacitors. Resistors. Filters
Circuit properties
Circuits
Cryogenics
Devices
Electric, optical and optoelectronic circuits
Electrical engineering. Electrical power engineering
Electronic equipment and fabrication. Passive components, printed wiring boards, connectics
Electronics
Exact sciences and technology
Integrated circuit technology
Mechanical properties
microbridge
MicroElectroMechanical Systems (MEMS)
Micromechanical devices
Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits
Millimeter wave integrated circuits
Millimeter wave technology
Niobium
Remote sensing
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Semiconductors
Space technology
Superconducting devices
Superconducting filters
Superconductivity
tunable filters
Tuning
variable capacitors
Various equipment and components
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Summary:Reconfigurable passive superconducting devices for the mm-wave regime offer a large spectrum of novel applications in scientific and industrial remote sensing. We developed a surface mounted Niobium (Nb) MEMS technology that can be integrated with a wide range of cryogenic semiconductor and superconducting circuits. A first generation of circuits using our Niobium SupraMEMS has been optimized for radio astronomical applications. In this paper we present the micro-mechanical and electrical characterization of the devices. Mechanical modeling results in an improved understanding of the specific behavior of metallic cryogenic MEMS devices. The influence of the fabrication procedure on the mechanical properties of the devices and the resulting limitations are discussed. A particular design for improved tuning range has been investigated.
ISSN:1051-8223
1558-2515
DOI:10.1109/TASC.2007.897874