A Single-Crystal-Silicon Bulk-Acoustic-Mode Microresonator Oscillator

A timing reference incorporating a single-crystal-silicon micromechanical resonator with a quality factor of larger than one million and a resonant frequency of 2.18 MHz is demonstrated. The resonator is excited in the square extensional bulk acoustic mode at 4 mtorr, and it has been fabricated in a...

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Bibliographic Details
Published in:IEEE electron device letters 2008-07, Vol.29 (7), p.701-703
Main Authors: Lee, J.E.-Y., Bahreyni, B., Yong Zhu, Seshia, A.A.
Format: Article
Language:English
Subjects:
Acoustic sensors
Acoustic wave devices, piezoelectric and piezoresistive devices
Allan deviation
Applied sciences
bulk acoustic resonators
Circuit properties
Deviation
Electric, optical and optoelectronic circuits
Electronic circuits
Electronics
Exact sciences and technology
Feedback loop
Foundries
high quality factor
MEMS oscillator
Micro- and nanoelectromechanical devices (mems/nems)
Microcavities
Micromechanical devices
Oscillators
Oscillators, resonators, synthetizers
Q factor
Quality factor
Resonant frequencies
Resonant frequency
Resonators
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Silicon
Single crystals
single-crystal silicon (SCS)
Time measurements
Timing
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Summary:A timing reference incorporating a single-crystal-silicon micromechanical resonator with a quality factor of larger than one million and a resonant frequency of 2.18 MHz is demonstrated. The resonator is excited in the square extensional bulk acoustic mode at 4 mtorr, and it has been fabricated in a foundry SOI MEMS process. The silicon microresonator is adapted as a timing element for a precision oscillator with a measured short-term Allan deviation of 0.6 ppb.
ISSN:0741-3106
1558-0563
DOI:10.1109/LED.2008.2000643