Hybrid-mounted micromachined aluminum hotwires for wall shear-stress measurements

In this paper, we present a micromachined metal hotwire anemometer sensor for use in wall shear-stress measurements. We describe its design and fabrication. A novel hybrid assembly method has been developed to make it possible to measure close to the surface without contacting leads interfering with...

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Bibliographic Details
Published in:Journal of microelectromechanical systems 2005-04, Vol.14 (2), p.254-260
Main Authors: Haasl, S., Mucha, D., Chernoray, V., Ebefors, T., Enoksson, P., Lofdahl, L., Stemme, G.
Format: Article
Language:English
Subjects:
Aluminum
Anemometers
Assembly
Design engineering
Electric variables measurement
Engineering mechanics
Fluid flow measurement
hotwire
Interference
microassembly
Micromachining
Micromechanics
microsensors
Sensor phenomena and characterization
Sensor systems
Sensors
Stress
TECHNOLOGY
TEKNIKVETENSKAP
Teknisk mekanik
Thermal sensors
Velocity measurement
wall shear stress
Walls
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Summary:In this paper, we present a micromachined metal hotwire anemometer sensor for use in wall shear-stress measurements. We describe its design and fabrication. A novel hybrid assembly method has been developed to make it possible to measure close to the surface without contacting leads interfering with the flow. Experimental results illustrate the behavior and characteristics of this sensor.
ISSN:1057-7157
1941-0158
1941-0158
DOI:10.1109/JMEMS.2004.839029