Micromechanical gratings for visible and near-infrared spectroscopy

We present a micromechanical grating array that acts as a configurable optical filter for low-cost and compact visible and near-infrared spectrometric sensors. We show how the grating array can be used either as a fast scanning monochromator or as a diffractive filter, and that the expected signal-t...

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Bibliographic Details
Published in:IEEE journal of selected topics in quantum electronics 2004-05, Vol.10 (3), p.604-613
Main Authors: Sagberg, H., Lacolle, M., Johansen, I.-R., Lvhaugen, O., Belikov, R., Solgaard, O., Sudb, A.S.
Format: Article
Language:English
Subjects:
Arrays
Configurable
Diffraction gratings
Electrostatic measurements
Gratings (spectra)
Micromechanical devices
Modulation
Monochromators
Optical arrays
Optical diffraction
Optical filters
Optical sensors
Sensor arrays
Signal to noise ratio
Spectra
Spectroscopy
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Description
Summary:We present a micromechanical grating array that acts as a configurable optical filter for low-cost and compact visible and near-infrared spectrometric sensors. We show how the grating array can be used either as a fast scanning monochromator or as a diffractive filter, and that the expected signal-to-noise ratio is approximately equal for the two modes of measurement. The free spectral range of the filter can be matched to a defined spectral measurement region, so that we can optimize the relationship between spectral resolution and electromechanical complexity. We have numerically studied diffraction efficiency and errors in filter shape. Finally, we fabricated a small configurable grating array and present measurement results that demonstrate electrostatic filter modulation.
ISSN:1077-260X
1558-4542
DOI:10.1109/JSTQE.2004.828491