Effect of the composition on the electrical properties of TaSixNy metal gate electrodes

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Bibliographic Details
Published in:IEEE electron device letters 2003-07, Vol.24 (7), p.439
Main Authors: Suh, You-Seok, Heuss, G.P, Lee, Jae-Hoon, Misra, V
Format: Article
Language:English
Online Access:Get full text
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ISSN:0741-3106
1558-0563
DOI:10.1109/LED.2003.814009