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Laser Induced Formation of Buried Void Layer in Silicon
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| Published in: | Journal of laser micro nanoengineering 2012-02, Vol.7 (1), p.93-96 |
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| Main Author: | |
| Format: | Article |
| Language: | English |
| Online Access: | Get full text |
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| ISSN: | 1880-0688 1880-0688 |
| DOI: | 10.2961/jlmn.2012.01.0018 |