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Growth of large area YBa2Cu3O7-x thin film by cylindrical hollow cathode sputtering

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Bibliographic Details
Published in:IEEE transactions on applied superconductivity 2001-03, Vol.11 (1), p.3844-3847
Main Authors: SUH, Jeong-Dae, SEOK KIL HAN, KWANG YONG KANG, MIN HWAN KWAK
Format: Article
Language:English
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ISSN:1051-8223
1558-2515
DOI:10.1109/77.919903