Chemical and optical characterisation of atomic layer deposition aluminium doped ZnO films for photovoltaics by glow discharge optical emission spectrometry

Aluminium doped ZnO (AZO) alloy films produced by atomic layer deposition (ALD) are analysed by glow discharge optical emission spectrometry (GD-OES). A measurement procedure is established, to determine simultaneously thickness, mean chemical composition and refractive index of homogeneous films us...

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Published in:Journal of analytical atomic spectrometry 2011-01, Vol.26 (4), p.822-827
Main Authors: Schmitt, S. W., Gamez, G., Sivakov, V., Schubert, M., Christiansen, S. H., Michler, J.
Format: Article
Language:English
Subjects:
Aluminum
Azo
Deposition
Glow discharges
Solar cells
Spectrometry
Spectroscopy
Zinc oxide
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cited_by cdi_FETCH-LOGICAL-c264t-b504884c7b8fc81bdb7ed0eebe2f48c86b4b0a4d24713d459e2b255a3ef49113
cites cdi_FETCH-LOGICAL-c264t-b504884c7b8fc81bdb7ed0eebe2f48c86b4b0a4d24713d459e2b255a3ef49113
container_end_page 827
container_issue 4
container_start_page 822
container_title Journal of analytical atomic spectrometry
container_volume 26
creator Schmitt, S. W.
Gamez, G.
Sivakov, V.
Schubert, M.
Christiansen, S. H.
Michler, J.
description Aluminium doped ZnO (AZO) alloy films produced by atomic layer deposition (ALD) are analysed by glow discharge optical emission spectrometry (GD-OES). A measurement procedure is established, to determine simultaneously thickness, mean chemical composition and refractive index of homogeneous films using GD-OES and profilometry measurements. The GD-OES measured Al contents of the AZO films lie below those expected for the realised ALD cycles. Determined refractive indices are of the same accuracy as ellipsometry measurements and are dependent on the film composition as well as on the wavelength of the spectral lines used for analysis. The findings support the use of GD-OES as an analysis technique in the development of photovoltaic thin films.
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fullrecord <record><control><sourceid>proquest_cross</sourceid><recordid>TN_cdi_proquest_miscellaneous_1010877786</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>1010877786</sourcerecordid><originalsourceid>FETCH-LOGICAL-c264t-b504884c7b8fc81bdb7ed0eebe2f48c86b4b0a4d24713d459e2b255a3ef49113</originalsourceid><addsrcrecordid>eNpFkUtLAzEUhYMoWB8bf0GWIowmM8kkXUrxBYVuunIz5HGnTclMxiRV-l_8sU5b0dU9cD_OOXAQuqHknpJq-mDIRhFCuVQnaEKrmhWcM3aKJqSsRTFlQpyji5Q2hBDGSz5B37M1dM4oj1VvcRjyQZu1ispkiC6p7EKPQ4tVDiOIvdpBxBaGkNzhpfy2c73bdtiGASx-7xe4db5LuA0RD-uQw2fwWTmTsN7hlQ9f2Lq0j1jBX-JYIqW9XRrA5Bg6yHF3hc5a5RNc_95LtHx-Ws5ei_ni5W32OC9MWbNcaE6YlMwILVsjqbZagCUAGsqWSSNrzTRRzJZM0MoyPoVSl5yrClo2pbS6RLdH2yGGjy2k3IxlDHivegjb1FBCiRRCyHpE746oiSGlCG0zRNepuBuhZr9A879A9QNvi35z</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>1010877786</pqid></control><display><type>article</type><title>Chemical and optical characterisation of atomic layer deposition aluminium doped ZnO films for photovoltaics by glow discharge optical emission spectrometry</title><source>Royal Society of Chemistry</source><creator>Schmitt, S. W. ; Gamez, G. ; Sivakov, V. ; Schubert, M. ; Christiansen, S. H. ; Michler, J.</creator><creatorcontrib>Schmitt, S. W. ; Gamez, G. ; Sivakov, V. ; Schubert, M. ; Christiansen, S. H. ; Michler, J.</creatorcontrib><description>Aluminium doped ZnO (AZO) alloy films produced by atomic layer deposition (ALD) are analysed by glow discharge optical emission spectrometry (GD-OES). A measurement procedure is established, to determine simultaneously thickness, mean chemical composition and refractive index of homogeneous films using GD-OES and profilometry measurements. The GD-OES measured Al contents of the AZO films lie below those expected for the realised ALD cycles. Determined refractive indices are of the same accuracy as ellipsometry measurements and are dependent on the film composition as well as on the wavelength of the spectral lines used for analysis. The findings support the use of GD-OES as an analysis technique in the development of photovoltaic thin films.</description><identifier>ISSN: 0267-9477</identifier><identifier>EISSN: 1364-5544</identifier><identifier>DOI: 10.1039/c0ja00158a</identifier><language>eng</language><subject>Aluminum ; Azo ; Deposition ; Glow discharges ; Solar cells ; Spectrometry ; Spectroscopy ; Zinc oxide</subject><ispartof>Journal of analytical atomic spectrometry, 2011-01, Vol.26 (4), p.822-827</ispartof><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c264t-b504884c7b8fc81bdb7ed0eebe2f48c86b4b0a4d24713d459e2b255a3ef49113</citedby><cites>FETCH-LOGICAL-c264t-b504884c7b8fc81bdb7ed0eebe2f48c86b4b0a4d24713d459e2b255a3ef49113</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,780,784,27924,27925</link.rule.ids></links><search><creatorcontrib>Schmitt, S. W.</creatorcontrib><creatorcontrib>Gamez, G.</creatorcontrib><creatorcontrib>Sivakov, V.</creatorcontrib><creatorcontrib>Schubert, M.</creatorcontrib><creatorcontrib>Christiansen, S. H.</creatorcontrib><creatorcontrib>Michler, J.</creatorcontrib><title>Chemical and optical characterisation of atomic layer deposition aluminium doped ZnO films for photovoltaics by glow discharge optical emission spectrometry</title><title>Journal of analytical atomic spectrometry</title><description>Aluminium doped ZnO (AZO) alloy films produced by atomic layer deposition (ALD) are analysed by glow discharge optical emission spectrometry (GD-OES). A measurement procedure is established, to determine simultaneously thickness, mean chemical composition and refractive index of homogeneous films using GD-OES and profilometry measurements. The GD-OES measured Al contents of the AZO films lie below those expected for the realised ALD cycles. Determined refractive indices are of the same accuracy as ellipsometry measurements and are dependent on the film composition as well as on the wavelength of the spectral lines used for analysis. The findings support the use of GD-OES as an analysis technique in the development of photovoltaic thin films.</description><subject>Aluminum</subject><subject>Azo</subject><subject>Deposition</subject><subject>Glow discharges</subject><subject>Solar cells</subject><subject>Spectrometry</subject><subject>Spectroscopy</subject><subject>Zinc oxide</subject><issn>0267-9477</issn><issn>1364-5544</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2011</creationdate><recordtype>article</recordtype><recordid>eNpFkUtLAzEUhYMoWB8bf0GWIowmM8kkXUrxBYVuunIz5HGnTclMxiRV-l_8sU5b0dU9cD_OOXAQuqHknpJq-mDIRhFCuVQnaEKrmhWcM3aKJqSsRTFlQpyji5Q2hBDGSz5B37M1dM4oj1VvcRjyQZu1ispkiC6p7EKPQ4tVDiOIvdpBxBaGkNzhpfy2c73bdtiGASx-7xe4db5LuA0RD-uQw2fwWTmTsN7hlQ9f2Lq0j1jBX-JYIqW9XRrA5Bg6yHF3hc5a5RNc_95LtHx-Ws5ei_ni5W32OC9MWbNcaE6YlMwILVsjqbZagCUAGsqWSSNrzTRRzJZM0MoyPoVSl5yrClo2pbS6RLdH2yGGjy2k3IxlDHivegjb1FBCiRRCyHpE746oiSGlCG0zRNepuBuhZr9A879A9QNvi35z</recordid><startdate>20110101</startdate><enddate>20110101</enddate><creator>Schmitt, S. W.</creator><creator>Gamez, G.</creator><creator>Sivakov, V.</creator><creator>Schubert, M.</creator><creator>Christiansen, S. H.</creator><creator>Michler, J.</creator><scope>AAYXX</scope><scope>CITATION</scope><scope>7QF</scope><scope>7U5</scope><scope>8FD</scope><scope>JG9</scope><scope>L7M</scope></search><sort><creationdate>20110101</creationdate><title>Chemical and optical characterisation of atomic layer deposition aluminium doped ZnO films for photovoltaics by glow discharge optical emission spectrometry</title><author>Schmitt, S. W. ; Gamez, G. ; Sivakov, V. ; Schubert, M. ; Christiansen, S. H. ; Michler, J.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c264t-b504884c7b8fc81bdb7ed0eebe2f48c86b4b0a4d24713d459e2b255a3ef49113</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2011</creationdate><topic>Aluminum</topic><topic>Azo</topic><topic>Deposition</topic><topic>Glow discharges</topic><topic>Solar cells</topic><topic>Spectrometry</topic><topic>Spectroscopy</topic><topic>Zinc oxide</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Schmitt, S. W.</creatorcontrib><creatorcontrib>Gamez, G.</creatorcontrib><creatorcontrib>Sivakov, V.</creatorcontrib><creatorcontrib>Schubert, M.</creatorcontrib><creatorcontrib>Christiansen, S. H.</creatorcontrib><creatorcontrib>Michler, J.</creatorcontrib><collection>CrossRef</collection><collection>Aluminium Industry Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Journal of analytical atomic spectrometry</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Schmitt, S. W.</au><au>Gamez, G.</au><au>Sivakov, V.</au><au>Schubert, M.</au><au>Christiansen, S. H.</au><au>Michler, J.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Chemical and optical characterisation of atomic layer deposition aluminium doped ZnO films for photovoltaics by glow discharge optical emission spectrometry</atitle><jtitle>Journal of analytical atomic spectrometry</jtitle><date>2011-01-01</date><risdate>2011</risdate><volume>26</volume><issue>4</issue><spage>822</spage><epage>827</epage><pages>822-827</pages><issn>0267-9477</issn><eissn>1364-5544</eissn><abstract>Aluminium doped ZnO (AZO) alloy films produced by atomic layer deposition (ALD) are analysed by glow discharge optical emission spectrometry (GD-OES). A measurement procedure is established, to determine simultaneously thickness, mean chemical composition and refractive index of homogeneous films using GD-OES and profilometry measurements. The GD-OES measured Al contents of the AZO films lie below those expected for the realised ALD cycles. Determined refractive indices are of the same accuracy as ellipsometry measurements and are dependent on the film composition as well as on the wavelength of the spectral lines used for analysis. The findings support the use of GD-OES as an analysis technique in the development of photovoltaic thin films.</abstract><doi>10.1039/c0ja00158a</doi><tpages>6</tpages></addata></record>
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subjects Aluminum
Azo
Deposition
Glow discharges
Solar cells
Spectrometry
Spectroscopy
Zinc oxide
title Chemical and optical characterisation of atomic layer deposition aluminium doped ZnO films for photovoltaics by glow discharge optical emission spectrometry
url http://sfxeu10.hosted.exlibrisgroup.com/loughborough?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-07T14%3A33%3A23IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Chemical%20and%20optical%20characterisation%20of%20atomic%20layer%20deposition%20aluminium%20doped%20ZnO%20films%20for%20photovoltaics%20by%20glow%20discharge%20optical%20emission%20spectrometry&rft.jtitle=Journal%20of%20analytical%20atomic%20spectrometry&rft.au=Schmitt,%20S.%20W.&rft.date=2011-01-01&rft.volume=26&rft.issue=4&rft.spage=822&rft.epage=827&rft.pages=822-827&rft.issn=0267-9477&rft.eissn=1364-5544&rft_id=info:doi/10.1039/c0ja00158a&rft_dat=%3Cproquest_cross%3E1010877786%3C/proquest_cross%3E%3Cgrp_id%3Ecdi_FETCH-LOGICAL-c264t-b504884c7b8fc81bdb7ed0eebe2f48c86b4b0a4d24713d459e2b255a3ef49113%3C/grp_id%3E%3Coa%3E%3C/oa%3E%3Curl%3E%3C/url%3E&rft_id=info:oai/&rft_pqid=1010877786&rft_id=info:pmid/&rfr_iscdi=true