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Effects of traces of oxygen on Grimm-type glow discharges in argon
We report results of studies using Fourier Transform Optical Emission Spectroscopy (FT-OES) to investigate the effects of added oxygen (0.04-0.8% v/v) on observed spectra from a Grimm-type glow discharge, generated in argon plasma with a pure iron sample. Significant changes in the sputter rate and...
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Published in: | Journal of analytical atomic spectrometry 2011-01, Vol.26 (4), p.766-775 |
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Main Authors: | , , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | We report results of studies using Fourier Transform Optical Emission Spectroscopy (FT-OES) to investigate the effects of added oxygen (0.04-0.8% v/v) on observed spectra from a Grimm-type glow discharge, generated in argon plasma with a pure iron sample. Significant changes in the sputter rate and the intensities of atomic lines of the carrier gas and sample in the presence of oxygen are discussed in detail; these changes are greater than those observed with Ar/H2 and Ar/N2 mixtures. A detailed study of spectral line profiles shows changes in self-absorption of Ar I lines due to O2 and H2 traces. The sputter rate for a given Ar/O2 gas mixture is found not to be proportional to current. |
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ISSN: | 0267-9477 1364-5544 |
DOI: | 10.1039/C0JA00013B |