Planar waveguides in magnesium doped stoichiometric LiNbO3 crystals formed by MeV oxygen ion implantations

The planar waveguides were formed in magnesium doped stoichiometric LiNbO3 crystals by means of 4.5MeV oxygen ion implantations at different fluences. The dark mode spectra were measured by the prism coupling method. The annealing behaviors of the formed waveguides were characterized by a series of...

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Bibliographic Details
Published in:Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Beam interactions with materials and atoms, 2012-02, Vol.272, p.121-124
Main Authors: Wang, Lei, Xiang, Bing-Xi
Format: Article
Language:English
Subjects:
Annealing
Backscattering
Crystals
Ion implantation
Magnesium
Planar waveguides
Prisms
Spectra
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Summary:The planar waveguides were formed in magnesium doped stoichiometric LiNbO3 crystals by means of 4.5MeV oxygen ion implantations at different fluences. The dark mode spectra were measured by the prism coupling method. The annealing behaviors of the formed waveguides were characterized by a series of annealing treatments. The Rutherford backscattering/channeling technique was used to investigate the damage produced by the ion implantation.
ISSN:0168-583X
DOI:10.1016/j.nimb.2011.01.046