Visualization of Electron Transport Coefficients in RF Electric and Magnetic Fields Crossed at Arbitrary Angles

The Boltzmann equation for charged particle swarms in gases subject to arbitrarily oriented spatially homogeneous and time-dependent electric and magnetic fields is solved by a recently developed multiterm theory, and attention is focused on the portrayal of the electron transport properties. Tempor...

Full description

Saved in:
Bibliographic Details
Published in:IEEE transactions on plasma science 2011-11, Vol.39 (11), p.2560-2561
Main Authors: Dujko, S., White, R. D., Petrovic, Z. L.
Format: Article
Language:English
Subjects:
Amplitudes
Boltzmann equation
Charged particles
Distribution functions
Electric fields
Electron transport
Gases
Kinetic theory
Magnetic fields
Mathematical analysis
Mathematical model
Mathematical models
Plasmas
Radio frequency
Ramps
RF electric and magnetic fields
swarms
Temporal logic
Tensile stress
transport coefficients
Visualization
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:The Boltzmann equation for charged particle swarms in gases subject to arbitrarily oriented spatially homogeneous and time-dependent electric and magnetic fields is solved by a recently developed multiterm theory, and attention is focused on the portrayal of the electron transport properties. Temporal variations of the electron transport data are presented for the Reid ramp model gas in varying configurations of electric and magnetic fields for a fixed field frequency and amplitudes of the electric and magnetic fields.
ISSN:0093-3813
1939-9375
DOI:10.1109/TPS.2011.2150246