Thermoelastic vibration analysis of Mems/Nems plate resonators with voids

In this paper, the effect of voids, relaxation times, thermomechanical coupling, surface conditions, and plate dimensions on energy dissipation induced by thermoelastic damping in microelectronics mechanical systems (MEMS)/ nanoelectronics mechanical systems (NEMS) resonators are investigated. Close...

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Bibliographic Details
Published in:Acta mechanica 2012, Vol.223 (1), p.167-187
Main Authors: Sharma, J. N., Grover, D.
Format: Article
Language:English
Subjects:
Classical and Continuum Physics
Control
Dynamical Systems
Elasticity
Engineering
Engineering Thermodynamics
Exact solutions
Heat and Mass Transfer
Kinematics
Magnesium
Materials science
Mathematical analysis
Matlab
Mechanical engineering
Mechanical systems
Nanoelectromechanical systems
Nitrides
Resonators
Solid Mechanics
Theoretical and Applied Mechanics
Vibration
Vibration analysis
Voids
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Summary:In this paper, the effect of voids, relaxation times, thermomechanical coupling, surface conditions, and plate dimensions on energy dissipation induced by thermoelastic damping in microelectronics mechanical systems (MEMS)/ nanoelectronics mechanical systems (NEMS) resonators are investigated. Closed form expressions for the transverse vibrations of a homogenous isotropic, thermoelastic thin plate with voids, based on Kirchhoff theory have been derived. The exact solutions for the free vibrations of plates under clamped-simply supported (CS) and simply supported-simply supported (SS) conditions are obtained. Analytical expressions for deflection, temperature change, frequency shifts, and thermoelastic damping in the plate have been derived. Some numerical results with the help of MATLAB programming software in case of silicon nitride and magnesium like material have also been presented.
ISSN:0001-5970
1619-6937
DOI:10.1007/s00707-011-0557-0