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Nonlinear processes of probe formation of a beam with inhomogeneous phase density at nuclear microprobe
The work describes nonlinear processes of probe formation on the target with allowance for an inhomogeneous density of ion distribution in phase space in the object collimator plane taken from experimental data. The chromatic aberrations, intrinsic aberrations of the 3rd order and parasitic aberrati...
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Published in: | Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Beam interactions with materials and atoms, 2011-10, Vol.269 (20), p.2197-2201 |
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Main Authors: | , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | The work describes nonlinear processes of probe formation on the target with allowance for an inhomogeneous density of ion distribution in phase space in the object collimator plane taken from experimental data. The chromatic aberrations, intrinsic aberrations of the 3rd order and parasitic aberrations caused by sextupole and octupole components of the magnetic quadrupole lens field have been taken into account in the object-target phase coordinate transformation. The criterion of obtaining the optimal resolution was defined as the minimum spot size (FWHM) for a fixed ratio IFWHM/I0 of beam current in this spot to the total beam current. The conditions for which the initial density of ion distribution in phase space is matched with the ion-optical characteristics of the probe-forming system were considered. The influence of axial brightness and parasitic sextupole and octupole field components on the beam current distribution at the target has been determined. |
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ISSN: | 0168-583X 1872-9584 |
DOI: | 10.1016/j.nimb.2011.02.022 |