Fabrication and characterization of implantable silicon neural probe with microfluidic channels

In this paper, a silicon-based neural probe with microfluidic channels was developed and evaluated. The probe can deliver chemicals or drugs to the target neurons while simultaneously recording the electrical action of these neurons extracellularly. The probe was fabricated by double-sided deep reac...

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Bibliographic Details
Published in:Science China. Technological sciences 2012, Vol.55 (1), p.1-5
Main Authors: Guo, Kai, Pei, WeiHua, Li, XiaoQian, Gui, Qiang, Tang, RongYu, Liu, Jian, Chen, HongDa
Format: Article
Language:English
Subjects:
Channels
Electrodes
Engineering
Microfluidics
Neurons
Pressure drop
Reactive ion etching
Recording
Silicon
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Summary:In this paper, a silicon-based neural probe with microfluidic channels was developed and evaluated. The probe can deliver chemicals or drugs to the target neurons while simultaneously recording the electrical action of these neurons extracellularly. The probe was fabricated by double-sided deep reactive ion etching （DRIE） from a silicon-on-insulator （SO1） wafer. The flu- idic channels were formed with V-shape groove etching on the silicon probe and sealed with silicon nitride and parylene-C. The shank of the probe is 4 mm long and 120 ~tm wide. The thickness of the probe is 100 ~tm. The probe has two fluidic chan- nels and two recording sites. The microfluidic channels can withstand a pressure drop as much as 30 kPa and the flow resisti ity of the microfluidic channel is 0.13 μL min-1 kPa-1, The typical impedance of the neural electrode is 32.3 kΩ at 1 kHz at room temperature.
ISSN:1674-7321
1869-1900
DOI:10.1007/s11431-011-4569-8