Comparison of properties of titanium aluminium nitride film produced by using two different types of Ti-Al target

• Published in: Surface and interface analysis 2009-10, Vol.41 (10), p.794-798
• Main Authors: Larpkiattaworn, Siriporn, Ikeuchi, Jun, Eamchotchawalit, Chutima
• Format: Article
• Language: English
• Subjects: AIP coating method; Aluminum; Condensed matter: structure, mechanical and thermal properties; Cross-disciplinary physics: materials science; rheology; Droplets; Exact sciences and technology; Intermetallic compounds; Intermetallics; Ion and electron beam-assisted deposition; ion plating; Materials science; Mechanical and acoustical properties; Methods of deposition of films and coatings; film growth and epitaxy; Microstructure; Physical properties of thin films, nonelectronic; Physics; Single-crystal and powder diffraction; sintered and melted targets; Sintering; Solid phases; Structure of solids and liquids; crystallography; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties); Thin films; Ti-Al target; TiAlN film; Titanium; X-ray diffraction and scattering
• ISSN: 0142-2421; 1096-9918; 1096-9918
• DOI: 10.1002/sia.3100

This work aims to study the influence of two different types of Ti–Al target (sintered and melted) which have same nominal composition (50 at% Ti, 50 at% Al) on the properties of thin films coated by using arc ion plating (AIP) method. The hardness of the melted target was of higher value than that of the sintered target. The property of the film is related to the microstructure and phase analysis of both types of target that have quite different phases. Ti and Al metals were found as major phases and TiAl2 as minor phase in the sintered target but only TiAl compound was found in the melted target. After film coating at the same operation parameters, it was found that although the phase structures of the sintered and melted targets were quite different, the coated thin films using these targets showed the same phase structure of Ti0.5 Al0.5 N. However, the microstructure of films coated by using the sintered target showed higher density of droplets and pores than those of film produced by using the melted target. As a result, the hardness and adhesion strength of thin film produced by using the melted target were slightly higher than those values of film produced by using the sintered target. Copyright © 2009 John Wiley & Sons, Ltd.