Depth profiling by cluster projectiles as seen by computer simulations

• Published in: Surface and interface analysis 2011-01, Vol.43 (1-2), p.12-15
• Main Authors: Postawa, Z., Rzeznik, L., Paruch, R., Russo, M. F., Winograd, N., Garrison, B. J.
• Format: Article
• Language: English
• Subjects: Atomic, molecular, and ion beam impact and interactions with surfaces; Buckminsterfullerene; Chemical composition analysis, chemical depth and dopant profiling; cluster bombardment; Clusters; Computer simulation; Condensed matter: electronic structure, electrical, magnetic, and optical properties; Cross-disciplinary physics: materials science; rheology; Depth profiling; Electron and ion emission by liquids and solids; impact phenomena; Exact sciences and technology; Fullerenes; Fundamentals and general; Impact phenomena (including electron spectra and sputtering); Interface analysis; Materials science; Materials testing; molecular dynamics simulations; Physics; Projectiles; Rheology; Secondary ion mass spectrometry; SIMS
• ISSN: 0142-2421; 1096-9918; 1096-9918
• DOI: 10.1002/sia.3417

Molecular dynamics computer simulations are used to probe the development of the surface morphology and the processes that determine the depth resolution in depth profiling experiments performed by secondary ion and neutral mass spectrometry (SIMS/SNMS). The Ag(111) surface is irradiated by an impact of 20‐keV Au3, C60 and Ar872 clusters that represent a broad range of cluster projectiles used in SIMS/SNMS experiments. Improvements in the simulation protocol including automation and optimal sample shape allow for at least 1000 consecutive impacts for each set of initial conditions. This novel approach allows to shrink the gap between single‐impact simulations and real experiments in which numerous impacts are used. Copyright © 2010 John Wiley & Sons, Ltd.