Application of the Taguchi approach of the design of experiments for determination constructional and working parameters of the linear Venetian blind microdroplet filter

• Published in: Vacuum 2012-03, Vol.86 (9), p.1248-1254
• Main Authors: Zavaleyev, V., Walkowicz, J.
• Format: Article
• Language: English
• Subjects: Angular distribution of microdroplets; Blinds; Cleaning efficiency; Construction; Direct current; Electric arcs; Electrostatic filter; Electrostatics; Filtering; Filtration; Ion current intensity; Taguchi method; Titanium
• ISSN: 0042-207X; 1879-2715
• DOI: 10.1016/j.vacuum.2011.11.006

The aim of the investigations presented in the paper was to study the influence of constructional and working parameters of the linear Venetian blind electrostatic filter on its filtering efficiency and to determine optimal conditions for the filter exploitation. The flow of titanium vacuum-arc plasma, produced in DC discharge with superimposed high-current arc pulses, through the linear Venetian blind filters of different construction was investigated. The dependences of the filtering efficiency and the ion current intensity on the gas pressure, arc pulses frequency, distance and tilt angle of the filter blinds were determined. The plan of the experiment was developed using Taguchi method and the conditions, which guarantee maximal cleaning efficiency at maximal plasma transmission through the filter were determined for Ti. Based on the obtained results the initial construction of the filter was modified. The angular distribution of microdroplets generated from titanium cathode and reaching the substrate was investigated in two configurations – without and with the electrostatic filter. ► Vacuum-arc plasma of DC discharge with superimposed high-current arc pulses. ► Linear Venetian blind electrostatic filter for microdroplets separation. ► Taguchi procedure for planning of the experiments and processing the results. ► Effectiveness of the Venetian blind filter in titanium microparticles separation.