Felling of individual freestanding nanoobjects using focused-ion-beam milling for investigations of structural and transport properties

We report that, to enable studies of their compositional, structural and electrical properties, freestanding individual nanoobjects can be selectively felled in a controllable way by the technique of low-current focused-ion-beam (FIB) milling with the ion beam at a chosen angle of incidence to the n...

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Bibliographic Details
Published in:Nanotechnology 2012-03, Vol.23 (10), p.105301-1-7
Main Authors: Li, Wuxia, Fenton, J C, Cui, Ajuan, Wang, Huan, Wang, Yiqian, Gu, Changzhi, McComb, D W, Warburton, P A
Format: Article
Language:English
Subjects:
Electrical properties
Ion beams
Nanocomposites
Nanomaterials
Nanostructure
Nanotechnology
Nanowires
Transport properties
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Summary:We report that, to enable studies of their compositional, structural and electrical properties, freestanding individual nanoobjects can be selectively felled in a controllable way by the technique of low-current focused-ion-beam (FIB) milling with the ion beam at a chosen angle of incidence to the nanoobject. To demonstrate the suitability of the technique, we report results for zigzag/straight tungsten nanowires grown vertically on support substrates and then felled for characterization. We also describe a systematic investigation of the effect of the experimental geometry and parameters on the felling process and on the induced wire-bending phenomenon. The method of felling freestanding nanoobjects using FIB is an advantageous new technique enabling investigations of the properties of selected individual nanoobjects.
ISSN:0957-4484
1361-6528
DOI:10.1088/0957-4484/23/10/105301