Fabrication of two-dimensional superposed microstructure by interference lithography

In this paper, we report the basic theory and method of single exposure interference lithography (IL) to fabricate two-dimensional (2D) superposed microstructures. Distribution of six-beam interference intensities with different azimuth angle is discussed, and 2D superposed microstructures with diff...

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Bibliographic Details
Published in:Applied optics (2004) 2012-01, Vol.51 (3), p.302-305
Main Authors: Lü, Hao, Zhao, Qiu-Ling, Zhang, Qing-Yue, Niu, Dong-Jie, Wang, Xia
Format: Article
Language:English
Subjects:
Computer simulation
Constants
Interference
Lasing
Lithography
Microstructure
Photonic crystals
Two dimensional
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Summary:In this paper, we report the basic theory and method of single exposure interference lithography (IL) to fabricate two-dimensional (2D) superposed microstructures. Distribution of six-beam interference intensities with different azimuth angle is discussed, and 2D superposed microstructures with different periodic constants are obtained by computer simulations. The experiment results using CHP-C positive photoresist show a 2D superposed photonic crystal composed of a periodically repeated hexagonal pattern of hexagonal lattice cells, which is in close agreement with the computer simulation. Fabrication of a superposed structure by single exposure IL paves the way for studying 2D photonic crystal fabrication, surface lasing, optical waveguides, and so on.
ISSN:1559-128X
2155-3165
DOI:10.1364/ao.51.000302