Positioning FBAR technology in the frequency and timing domain

This paper focuses on the technical differentiation of film bulk acoustic resonator (FBAR) technology from other mechanical resonator technologies for timing applications. The paper will touch on a recent modification of FBARs, the zero-drift resonator (ZDR), that is temperature compensated. One tec...

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Bibliographic Details
Published in:IEEE transactions on ultrasonics, ferroelectrics, and frequency control ferroelectrics, and frequency control, 2012-03, Vol.59 (3), p.334-345
Main Authors: Ruby, R., Small, M., Bi, F., Lee, D., Callaghan, L., Parker, R., Ortiz, S.
Format: Article
Language:English
Subjects:
Acoustic wave devices, piezoelectric and piezoresistive devices
Applied sciences
Couplings
Crystals
Electronics
Exact sciences and technology
Ferroelectric materials
Film bulk acoustic resonators
Frequency conversion
Frequency measurement
High frequencies
Markets
Oscillators
Resonant frequency
Resonators
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Silicon
Time measurements
Touch
Tuning
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Summary:This paper focuses on the technical differentiation of film bulk acoustic resonator (FBAR) technology from other mechanical resonator technologies for timing applications. The paper will touch on a recent modification of FBARs, the zero-drift resonator (ZDR), that is temperature compensated. One technology differentiator is the size of the chip-scale packaged resonator. Another is that the silicon lid is perfectly suitable for placement of integrated circuits and this is currently being done. Many factors (wide tuning range, high Q, high frequency, small size, integrated circuitry) are being used to differentiate potential products for the time and frequency markets.
ISSN:0885-3010
1525-8955
DOI:10.1109/TUFFC.2012.2202