Atmospheric pressure diffuse plasma in ambient air for ITO surface cleaning

• Published in: Applied surface science 2012-07, Vol.258 (18), p.7135-7139
• Main Authors: Homola, Tomáš, Matoušek, Jindřich, Medvecká, Veronika, Zahoranová, Anna, Kormunda, Martin, Kováčik, Dušan, Černák, Mirko
• Format: Article
• Language: English
• Subjects: Atmospheric diffuse plasma; Atmospherics; Carbon; Cleaning; Condensed matter: electronic structure, electrical, magnetic, and optical properties; Condensed matter: structure, mechanical and thermal properties; Contact angle; Cross-disciplinary physics: materials science; rheology; DCSBD; Diffusion; Diffusion barriers; Diffusion effects; Exact sciences and technology; Filament-free plasma; Indium tin oxide; ITO surface; Physics; X-ray photoelectron spectroscopy; XPS
• ISSN: 0169-4332; 1873-5584
• DOI: 10.1016/j.apsusc.2012.03.188

► Unique filament-free high-energy diffuse plasma in ambient air. ► Considerable decrease of carbon contamination after plasma treatment. ► Significant reduction of water contact angle after plasma treatment. Effects of atmospheric filament-free diffuse plasma in ambient air and oxygen by Diffuse Coplanar Surface Barrier Discharge (DCSBD) on surface of indium tin oxide (ITO) were studied. The DCSBD plasma treatment resulted in significant reduction of water contact angles (even for 1s long treatment). The decrease can be explained by the chemical changes on surface. These were studied by XPS which shows considerable decrease in the carbon surface concentration. The detailed analysis of C1s peak indicates the increase of the highest binding energy component of the C1s peak that corresponds to polar bonds with oxygen, which may be also related to decrease of water contact angle. AFM measurement showed no significant effect of plasma on ITO surface morphology.