Tunable behavior of reflectance minima in periodic Ge submicron grating structures

The periodic bullet-like and cone-like submicron grating (SMG) structures on germanium (Ge) substrates were fabricated by dry etching processes via laser interference lithography. Their optical reflectance characteristics as well as the wettability of the surface were investigated. The wide cone-lik...

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Published in:Journal of the Optical Society of America. B, Optical physics Optical physics, 2012-03, Vol.29 (3), p.357-362
Main Authors: Leem, Jung Woo, Kim, Yong Pyung, Yu, Jae Su
Format: Article
Language:English
Subjects:
Contact angle
Diffraction gratings
Germanium
Gratings (spectra)
Lithography
Reflectance
Reflectivity
Wettability
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description The periodic bullet-like and cone-like submicron grating (SMG) structures on germanium (Ge) substrates were fabricated by dry etching processes via laser interference lithography. Their optical reflectance characteristics as well as the wettability of the surface were investigated. The wide cone-like Ge SMG structure exhibited a lower reflectance than that of the narrow bullet-like Ge SMG structure at wavelengths of 300-1100 nm due to its relatively high volume fraction and the more linearly graded effective refractive index distribution between air and the Ge substrate. As the period of cone-like Ge SMGs was increased, the low reflectance band of
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subjects Contact angle
Diffraction gratings
Germanium
Gratings (spectra)
Lithography
Reflectance
Reflectivity
Wettability
title Tunable behavior of reflectance minima in periodic Ge submicron grating structures
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