UHV environments require more from motion systems

[...]the design of components and enclosures must be carefully considered in order to eliminate air entrapment (virtual leaks) and particulate generation. [...]the actuators must be cleaned, assembled, and packaged under conditions and protocols that are consistent with the requirements of the targe...

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Bibliographic Details
Published in:Laser focus world 2012-05, Vol.48 (5), p.39-48
Main Authors: Zeman, Milan, Titus, Jay
Format: Magazinearticle
Language:English
Subjects:
Chambers
Design
Devices
Lasers
Lubricants & lubrication
Manufacturing
Materials selection
Particle beams
Target markets
Temperature
Volatility
Online Access:Get full text
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Description
Summary:[...]the design of components and enclosures must be carefully considered in order to eliminate air entrapment (virtual leaks) and particulate generation. [...]the actuators must be cleaned, assembled, and packaged under conditions and protocols that are consistent with the requirements of the target markets.
ISSN:1043-8092