A normally closed electrostatic parylene microvalve for micro total analysis systems

This paper presents an electrostatically actuated, normally closed microvalve for parylene microfluidics. The proposed valve structure isolates the fluid from the electric field, and hence results in relatively low actuation potentials (

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Bibliographic Details
Published in:Sensors and actuators. A. Physical. 2012-07, Vol.181, p.81-86
Main Authors: Ynldnrnm, Ender, Arnkan, MASahir, Kulah, Haluk
Format: Article
Language:English
Subjects:
Actuation
Electric fields
Electric potential
Electrodes
Electrostatic
Electrostatics
Leakage
Micro total analysis systems
Microfluidics
Microvalve
Parylene
Valve seats
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Description
Summary:This paper presents an electrostatically actuated, normally closed microvalve for parylene microfluidics. The proposed valve structure isolates the fluid from the electric field, and hence results in relatively low actuation potentials (
ISSN:0924-4247
1873-3069
DOI:10.1016/j.sna.2012.05.008