Fabrication, microstructure, and mechanical properties of high strength cobalt sub-micron structures

The mechanical properties exhibited by sub-micron scale columnar structures of cobalt, fabricated by electron beam lithography and electroplating techniques, were investigated through uniaxial compression. Transmission electron microscopy analyses show these specimens possess a microstructure with s...

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Bibliographic Details
Published in:Materials science & engineering. A, Structural materials : properties, microstructure and processing Structural materials : properties, microstructure and processing, 2012-08, Vol.552, p.104-111
Main Authors: Jin, Sumin, Burek, Michael J., Evans, Robert D., Jahed, Zeinab, Leung, Michael C., Evans, Neal D., Tsui, Ting Y.
Format: Article
Language:English
Subjects:
Cobalt
Columnar structure
Compression
Condensed matter: structure, mechanical and thermal properties
Cross-disciplinary physics: materials science
rheology
Electrodeposition, electroplating
Electron beam lithography
Electroplating
Exact sciences and technology
Materials science
Mechanical and acoustical properties of condensed matter
Mechanical properties
Mechanical properties of nanoscale materials
Methods of deposition of films and coatings
film growth and epitaxy
Methods of nanofabrication
Microstructure
Nanocrystalline
Nanocrystals
Physics
Plasticity
Polycrystalline
Size effect
Strength
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Summary:The mechanical properties exhibited by sub-micron scale columnar structures of cobalt, fabricated by electron beam lithography and electroplating techniques, were investigated through uniaxial compression. Transmission electron microscopy analyses show these specimens possess a microstructure with sub-micron grains which are elongated and aligned near to the pillar loading axis. In addition, small nanocrystalline cobalt crystals are also present within the columnar structure. These specimens display exceptional mechanical strength comparable with both bulk polycrystalline and nanocrystalline cobalt deposited by electroplating. Size-dependent softening with shrinking sample dimensions is also observed in this work. Additionally, the strength of these sub-micron structures appears to be strain rate sensitive and comparable with bulk nanocrystalline cobalt specimens.
ISSN:0921-5093
1873-4936
DOI:10.1016/j.msea.2012.05.015