Study of structural property of n-type indium antimonide thin films

In present study, the n-type indium antimonide (InSb) thin films of thickness 300 nm were deposited on glass substrate at room temperature under the high vacuum ~10(-5) torr using starting materials. The starting materials have been prepared under vacuum -10(-5) torr in vacuum coating unit using ind...

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Bibliographic Details
Published in:Indian journal of pure & applied physics 2012-05, Vol.50 (5), p.339-346
Main Authors: Vishwakarma, S R, Verma, A K, Tripathi, R S N, Das, S
Format: Article
Language:English
Subjects:
Antimony
Dislocation density
Indium antimonides
Intermetallics
Scanning electron microscopy
Strain
Thin films
X-rays
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Summary:In present study, the n-type indium antimonide (InSb) thin films of thickness 300 nm were deposited on glass substrate at room temperature under the high vacuum ~10(-5) torr using starting materials. The starting materials have been prepared under vacuum -10(-5) torr in vacuum coating unit using indium (99.999%) and antimony (99.999%) metal powder as source materials with various non-stoichiometric composition as In(1-x)Sb(x)(0.2
ISSN:0019-5596