Undoped and 0.1 wt.% Ca-doped Pt-catalyzed SnO sub(2) sensors for CH sub(4) detection

Thin films of undoped and 0.1 wt.% Ca-doped SnO sub(2) with 30-60 a Pt layers deposited by ion beam sputtering have been structured on Si substrates. CH sub(4) sensitivities for those Pt-covered undoped and Ca-doped SnO sub(2) sensors are compared in terms of root-mean-square surface roughnesses mea...

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Bibliographic Details
Published in:Sensors and actuators. B, Chemical Chemical, 2005-07, Vol.108 (1-2), p.119-124
Main Authors: Min, B-K, Choi, S-D
Format: Article
Language:English
Subjects:
Catalysis
Catalysts
Ion beam sputtering
Platinum
Sensors
Silicon substrates
Tin dioxide
Tin oxides
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Summary:Thin films of undoped and 0.1 wt.% Ca-doped SnO sub(2) with 30-60 a Pt layers deposited by ion beam sputtering have been structured on Si substrates. CH sub(4) sensitivities for those Pt-covered undoped and Ca-doped SnO sub(2) sensors are compared in terms of root-mean-square surface roughnesses measured by the scanning probe microscopy in the AFM mode. There is an optimal Pt thickness of 45 a for maximum CH sub(4) sensitivity. Pt catalysts lead to increase in methane sensitivity for the undoped sensor. However, coating of a Pt catalyst layer on the Ca-doped SnO sub(2) results in an inverse effect on CH sub(4) sensitivity. All the fabricated sensors exhibited relatively small humidity dependencies and excellent long-term stabilities for 90 days.
ISSN:0925-4005
DOI:10.1016/j.snb.2004.12.112