Energy analyzer for spectrometers with high spatial resolution

A new energy analyzer compatible with high spatial resolution spectrometers is proposed. The analyzer accepts electrons emitted with polar angles from 90.5° to 98.5° in the full azimuth range. A position-sensitive detector collects these electrons in the parallel mode of registration by 30 virtual c...

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Bibliographic Details
Published in:Vacuum 2012-07, Vol.86 (12), p.2064-2066
Main Author: Gorelik, V.
Format: Article
Language:English
Subjects:
Channels
Emittance
Energy analyzer
Entrances
Grazing
Grazing angles
Microscopes
Registers
Spatial resolution
Spectrometers
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Description
Summary:A new energy analyzer compatible with high spatial resolution spectrometers is proposed. The analyzer accepts electrons emitted with polar angles from 90.5° to 98.5° in the full azimuth range. A position-sensitive detector collects these electrons in the parallel mode of registration by 30 virtual channels; each channel has the resolution of 0.2% and the entrance solid angle of 0.87 steradians. The proposed analyzer provides high lateral resolution due to its compatibility with extremely short-focused microscope lenses, and, at the same time, the system offers high spatial resolution in the normal direction due to its ability to register electrons emitted with grazing angles. ▸ A new energy analyzer with variable grazing angles is proposed. ▸ The analyzer can be combined with short-focused microscope lenses. ▸ The analyzer can be used for angular-resolved analysis.
ISSN:0042-207X
1879-2715
DOI:10.1016/j.vacuum.2012.05.035