Mechanism and process of fabricating fluorinated polyimide optical waveguide by CO2 laser direct-writing

Fluorinated polyimide waveguides were fabricated by CO 2 laser direct-writing. The poly(amic acid) micro-region irradiated by CO 2 laser beam was studied with FT-IR micro-spectroscopy. The FT-IR spectra implied that the laser induced thermal-imidized polyimide was of optical anisotropy, and the imid...

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Bibliographic Details
Published in:Optical and quantum electronics 2012-04, Vol.43 (11-15), p.163-174
Main Authors: Jin, Xi, Zhu, Daqing, Liu, Jinsong, Zeng, Xiaoyan
Format: Article
Language:English
Subjects:
Anisotropy
Apertures
Carbon dioxide
Characterization and Evaluation of Materials
Computer Communication Networks
Electrical Engineering
Fluorination
Lasers
Optical Devices
Optics
Photonics
Physics
Physics and Astronomy
Polyimide resins
Spectra
Waveguides
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Summary:Fluorinated polyimide waveguides were fabricated by CO 2 laser direct-writing. The poly(amic acid) micro-region irradiated by CO 2 laser beam was studied with FT-IR micro-spectroscopy. The FT-IR spectra implied that the laser induced thermal-imidized polyimide was of optical anisotropy, and the imidization degree of exposed micro-region increased with the rising of output laser power. The increased aspect ratio of waveguide and smoothness of surface can be achieved by increasing the pre-cured temperature (below 120°C) and writing speed, and optimizing laser power and the distance between the lens and the annular aperture. The guided light was clearly confined to the core of the fabricated waveguide, which means this technique can be used for fluorinated polyimide waveguide fabrication.
ISSN:0306-8919
1572-817X
DOI:10.1007/s11082-011-9519-y