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Dielectric, ferroelectric and optical properties of BaZr0.2Ti0.8O3 thin films prepared by sol–gel-hydrothermal process
BaZr 0.2 Ti 0.8 O 3 thin films on Pt/Ti/SiO 2 /Si substrates have been fabricated under low temperature conditions by a sol–gel-hydrothermal technique. The dielectric constant is 247–83 in the frequency range of 1 kHz–1 MHz. The corresponding dielectric loss is ~10 −2 . The capacitance–voltage curve...
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Published in: | Journal of sol-gel science and technology 2010-09, Vol.55 (3), p.343-347 |
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Main Authors: | , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | BaZr
0.2
Ti
0.8
O
3
thin films on Pt/Ti/SiO
2
/Si substrates have been fabricated under low temperature conditions by a sol–gel-hydrothermal technique. The dielectric constant is 247–83 in the frequency range of 1 kHz–1 MHz. The corresponding dielectric loss is ~10
−2
. The capacitance–voltage curve shows strong non-linear dielectric behavior leading to a high tunability, up to ~30% at 1 kHz. The remanent polarization and coercive field at room temperature are measured to be ~1.5 μC/cm
2
and ~90 kV/cm. The infrared optical properties of the thin films are investigated using an infrared spectroscopic ellipsometry in the wave number range of 800–4,000 cm
−1
. Optical constants of the thin films are simultaneously obtained. |
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ISSN: | 0928-0707 1573-4846 |
DOI: | 10.1007/s10971-010-2259-9 |