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Dielectric, ferroelectric and optical properties of BaZr0.2Ti0.8O3 thin films prepared by sol–gel-hydrothermal process

BaZr 0.2 Ti 0.8 O 3 thin films on Pt/Ti/SiO 2 /Si substrates have been fabricated under low temperature conditions by a sol–gel-hydrothermal technique. The dielectric constant is 247–83 in the frequency range of 1 kHz–1 MHz. The corresponding dielectric loss is ~10 −2 . The capacitance–voltage curve...

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Bibliographic Details
Published in:Journal of sol-gel science and technology 2010-09, Vol.55 (3), p.343-347
Main Authors: Xu, J. B., Shen, B., Zhai, J. W.
Format: Article
Language:English
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Summary:BaZr 0.2 Ti 0.8 O 3 thin films on Pt/Ti/SiO 2 /Si substrates have been fabricated under low temperature conditions by a sol–gel-hydrothermal technique. The dielectric constant is 247–83 in the frequency range of 1 kHz–1 MHz. The corresponding dielectric loss is ~10 −2 . The capacitance–voltage curve shows strong non-linear dielectric behavior leading to a high tunability, up to ~30% at 1 kHz. The remanent polarization and coercive field at room temperature are measured to be ~1.5 μC/cm 2 and ~90 kV/cm. The infrared optical properties of the thin films are investigated using an infrared spectroscopic ellipsometry in the wave number range of 800–4,000 cm −1 . Optical constants of the thin films are simultaneously obtained.
ISSN:0928-0707
1573-4846
DOI:10.1007/s10971-010-2259-9